Design and development of gas sensor based on microcantilever
MEMS/NEMS (Micro-/Nano Electro Mechanical Systems) sensors have attractedrngreat interest due to their small size, low cost, quick response time, as well as highrnsensitivity. In this project, a novel gas sensor based on microcantilever is proposed.rnThe sensor works with piezoelectric activation to vibrate the microcantilever at itsrnresonant frequency. Gas is sprayed to the experiment?s box where the sensor isrnplaced. It is expected and hypothesized that the resonant frequency of thernmicrocantilever vibration will shift by a certain amount due to the addition of mass ofrnthe gas clinging on the microcantilever. By sensing this certain resonant frequencyrnchange, the existence of a gas is detected and subsequently the change will bernevaluated to characterize the gas.
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